Outside dimensions: tolerance +/- .10mm
Surface Flatness: < ½ wave per inch depending on the thickness.
Transmitted Wave Front Error: < 1 wave over 90% clear aperture.
Scratch and Dig: 60/40 standard, 10/5 special.
All wafers come with a 45 degree x .3mm bevel, typical.
Diameter x Thickness |
Thickness Tol. |
100mm dia. x 0.5mm | +/-0.05mm |
+/-0.1mm | |
100mm dia. x 0.75mm | +/-0.05mm |
+/-0.1mm | |
100mm dia. x 1.0mm | +/-0.05mm |
+/-0.1mm | |
100mm dia. x 1.5mm | +/-0.05mm |
+/-0.1mm | |
150mm dia. x .5mm | +/-0.05mm |
+/-0.1mm | |
150mm dia. x 1.0mm | +/-0.05mm |
+/-0.1mm | |
150mm dia. x 1.5mm | +/-0.05mm |
+/-0.1mm | |
150mm dia. x 2.0mm | +/-0.05mm |
+/-0.1mm | |
150mm dia. x 3.0mm | +/-0.05mm |
+/-0.1mm |
* 200mm and 300mm wafer pricing upon request.
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